| 研究生: |
王俊傑 Chun-Chieh Wang |
|---|---|
| 論文名稱: |
平面式矽基折射率漸變透鏡之設計與應用 |
| 指導教授: |
張正陽
Jeng-Yang Chang |
| 口試委員: | |
| 學位類別: |
碩士 Master |
| 系所名稱: |
理學院 - 光電科學與工程學系 Department of Optics and Photonics |
| 畢業學年度: | 93 |
| 語文別: | 中文 |
| 論文頁數: | 69 |
| 中文關鍵詞: | 光耦合器 、光束傳播法 、矽基 、折射率漸變 |
| 外文關鍵詞: | coupler, GRIN, gradient, Beam propagation method |
| 相關次數: | 點閱:23 下載:0 |
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本論文提出平面式矽基折射率漸變透鏡之概念,在矽基板上沉積不同折射率的氮氧化矽膜層,再以蝕刻方式定義透鏡的輪廓、大小與位置。運用梯度折射率材質與透鏡曲面之特性,使透鏡分別在水平及垂直基板方向皆有聚焦、準直之能力。此透鏡具定位精準、易與其它半導體元件結合、系統積體化與微型化等優點。
論文中針對不同的系統需求,提出符合規格之透鏡設計。另外將此透鏡應用於光耦合系統與光學讀取頭系統,並討論此透鏡之優缺點與適用性。
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